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Cassette-less cleaning machine - List of Manufacturers, Suppliers, Companies and Products

Cassette-less cleaning machine Product List

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Cassette-less cleaning device (for wafer cleaning)

Cassette-less cleaning device (for wafer cleaning)

It is possible to remove particles without causing damage using Fine Sonic.

<Features> - Eliminates uneven cleaning of the cassette contact area. - Achieves greater cleanliness with a reduced amount of solution in the tank. - Significantly reduces power consumption. - Minimizes the amount of solution during inter-tank movement. - Uses Fine Sonic (high-frequency oscillator / transducer) to remove particles without causing damage.

  • Other semiconductor manufacturing equipment

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300mm wafer cassette-less cleaning system

300mm wafer cassette-less cleaning system

Achieved high purity of 65nμm / 5 pieces! Inserted 25 pieces into the gaps of 25 Wf to create a half pitch and processed 50 pieces at once.

The "300mm Cassette-less Wafer Cleaning System" is a product used in the chemical polishing process after final polishing. It processes 50 wafers at a time by placing 25 wafers in the gaps of 25 wafers in a half-pitch arrangement, achieving a high cleanliness level of 65nμm/5 pieces. 【Main Specifications】 ■ Items to be cleaned: 300mm thickness 0.75t ■ Processing method: Cassette-less dip processing ■ Processing speed: 50 pieces/5 min (variable) ■ Cleanliness inside the device: 0.1μm Class 1 ■ Pass line: FL+900±5mm manual set with a hoop ■ Transport method: Front transport *For more details, please refer to the PDF document or feel free to contact us.

  • Other cleaning machines

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